Microwave plasma characteristics
( 1 ) activity, microwave plasma of the gas ionization and dissociation degree than other types of plasma ( such as plasma arc ) 10 times higher . Therefore, the microwave plasma enhanced gas molecules more excitation, ionization and dissociation processes more excited metastable atoms . Such as nitrogen in the DC and RF discharge, undetectable by spectroscopic methods with a nitrogen atom spectral lines , but appeared in the microwave plasma nitrogen lines . Description of nitrogen in the DC and RF discharges , even can be decomposed into nitrogen atom , it is only excited state of nitrogen.
 ( 2 ) the reaction zone , no electrode , thus , eliminating the contamination of the electrode itself . Suitable for high- purity material preparation and handling , and the process more efficient.
( 3 ) the pressure in the reaction zone can be adjusted in a wide range .
 ( 4 ) Microwave Plasma free electrons in the plasma temperature is higher than the temperature , so by appropriate fields , pressure , gas type selection and adjustment, can control the reaction zone temperature range.
 ( 5 ) the distribution of the microwave electromagnetic field , the so-called "empty structure " , it is possible to plasma enclosed in a specific spatial ; magnetic fields can also be used to transport the plasma , this process is designed to allow separation of the discharge space processing region Thus, even in the process of taking various measures appropriate , and avoid or eliminate the plasma radiation damage some side reactions may occur .
  Because of these characteristics, microwave plasma synthesis of the material , sintering, deposition and etching , surface treatment, etc. .